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Proceedings Paper

The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS
Author(s): Ian Lacey; Nikolay A. Artemiev; Edward E. Domning; Wayne R. McKinney; Gregory Y. Morrison; Simon A. Morton; Brian V. Smith; Valeriy V. Yashchuk
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Paper Abstract

The autocollimator and moveable pentaprism based DLTP [NIM A 616 (2010) 212-223], a low-budget, NOM-like profiler at the Advanced Light Source (ALS), has been upgraded to provide fast, highly accurate surface slope metrology for long, side-facing, x-ray optics. This instrument arrangement decreases sensitivity to environmental conditions and removes the gravity effect on mirror shape. We provide design details of an affordable base tool, including clean-room environmental arrangements in the new ALS X-ray Optics Laboratory with advanced temperature stabilization and turbulence reduction, that yield measurements in under 8 hours with accuracy better than 30 nanoradians (rms) for super polished,190 mm flat optics, limited mainly by residual temporal instability of the experimental set-up. The upgraded DLTP has been calibrated for highly curved x-ray optics, allowing same day measurements of a 15 m ROC sphere with accuracy of better than 100 nanoradians (rms). The developed calibration procedure is discussed in detail. We propose this specific 15 m ROC sphere for use as a round-robin calibration test optic.

Paper Details

Date Published: 17 September 2014
PDF: 11 pages
Proc. SPIE 9206, Advances in Metrology for X-Ray and EUV Optics V, 920603 (17 September 2014); doi: 10.1117/12.2061969
Show Author Affiliations
Ian Lacey, Lawrence Berkeley National Lab. (United States)
Nikolay A. Artemiev, Lawrence Berkeley National Lab. (United States)
Edward E. Domning, Lawrence Berkeley National Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Gregory Y. Morrison, Lawrence Berkeley National Lab. (United States)
Simon A. Morton, Lawrence Berkeley National Lab. (United States)
Brian V. Smith, Lawrence Berkeley National Lab. (United States)
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 9206:
Advances in Metrology for X-Ray and EUV Optics V
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)

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