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Proceedings Paper

Development of a one-dimensional two-stage focusing system with two deformable mirrors
Author(s): T. Goto; S. Matsuyama; H. Nakamori; T. Kimura; Y. Sano; Y. Kohmura; K. Tamasaku; M. Yabashi; T. Ishikawa; K. Yamauchi
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Paper Abstract

A one-dimensional two-stage focusing system using two deformable mirrors was constructed. To realize the precise elliptical shapes, the mirror deformations were finely adjusted using the pencil-beam scan, which is a method of wavefront measurement. X-rays of 10 keV energy were one-dimensionally focused to a full width at half maximum of 90 nm, which agrees well with the diffraction limit.

Paper Details

Date Published: 3 October 2014
PDF: 8 pages
Proc. SPIE 9208, Adaptive X-Ray Optics III, 920802 (3 October 2014); doi: 10.1117/12.2061821
Show Author Affiliations
T. Goto, Osaka Univ. (Japan)
S. Matsuyama, Osaka Univ. (Japan)
H. Nakamori, Osaka Univ. (Japan)
T. Kimura, Hokkaido Univ. (Japan)
Y. Sano, Osaka Univ. (Japan)
Y. Kohmura, RIKEN (Japan)
K. Tamasaku, RIKEN (Japan)
M. Yabashi, RIKEN (Japan)
T. Ishikawa, RIKEN (Japan)
K. Yamauchi, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 9208:
Adaptive X-Ray Optics III
Stephen L. O'Dell; Ali M. Khounsary, Editor(s)

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