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Proceedings Paper

Manufacturing of freeform mirror by milling and altering its optical characteristics by Ns-laser polishing and ALD coatings
Author(s): Jarkko Mutanen; Jarno J. J. Kaakkunen; Hemmo Tuovinen; Jouni Hiltunen; Sini Kivi; Maunu Toiviainen; Juha Väyrynen; Janne Laukkanen; Victor Prokofiev; Pertti Pääkkönen; Mikko Juuti; Markku Kuittinen; Kari Mönkkönen
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Paper Abstract

In this study we tested ns-laser and an atomic layer deposition (ALD) for polishing and coating CNC-machined aluminum freeform mirrors that are used in a compact multipoint fiber optical probe. Two types of ALD coatings, aluminum oxide and silicon dioxide were tested. The surface roughness of mirrors was analyzed prior to and after nanosecond-laser polishing and coating them on a Beneq TFS 200 ALD device. The freeform aluminum mirrors with and without coatings were then measured with optical profiler. The results show that improvement in the surface roughness can be seen with ns-laser polished and ALD coated aluminum surfaces.

Paper Details

Date Published: 25 September 2014
PDF: 7 pages
Proc. SPIE 9192, Current Developments in Lens Design and Optical Engineering XV, 91921E (25 September 2014); doi: 10.1117/12.2061729
Show Author Affiliations
Jarkko Mutanen, Univ. of Eastern Finland (Finland)
Jarno J. J. Kaakkunen, VTT Technical Research Ctr. of Finland (Finland)
Hemmo Tuovinen, Univ. of Eastern Finland (Finland)
Jouni Hiltunen, Univ. of Eastern Finland (Finland)
Sini Kivi, VTT Technical Research Ctr. of Finland (Finland)
Maunu Toiviainen, VTT Technical Research Ctr. of Finland (Finland)
Juha Väyrynen, Karelia Univ. of Applied Sciences (Finland)
Janne Laukkanen, Univ. of Eastern Finland (Finland)
Victor Prokofiev, Univ. of Eastern Finland (Finland)
Pertti Pääkkönen, Univ. of Eastern Finland (Finland)
Mikko Juuti, VTT Technical Research Ctr. of Finland (Finland)
Markku Kuittinen, Univ. of Eastern Finland (Finland)
Kari Mönkkönen, Karelia Univ. of Applied Sciences (Finland)


Published in SPIE Proceedings Vol. 9192:
Current Developments in Lens Design and Optical Engineering XV
R. Barry Johnson; Virendra N. Mahajan; Simon Thibault, Editor(s)

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