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Proceedings Paper

Scatterometric characterization of diffractive optical elements
Author(s): Toni Saastamoinen; Hannu Husu; Janne Laukkanen; Samuli Siitonen; Jari Turunen; Antti Lassila
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Paper Abstract

Diffractive optical elements offer a great way to control light beyond the capabilities of traditional refractive components. Because of the very small feature sizes, the characterization of diffractive optical elements is challenging. Using current invasive methods, such as scanning electron microscope (SEM) or atomic force microscope (AFM), the measurements are slow and potentially destructive to the element. Employing optical scatterometery, the measurements are not only fast and non-destructive but also integrable to inline control of the fabrication and replication processes. In this work we use scatterometer to determine the dimensional parameters of binary diffractive optical elements and compare the results with the parameters obtained with AFM and SEM.

Paper Details

Date Published: 27 August 2014
PDF: 4 pages
Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 91730I (27 August 2014); doi: 10.1117/12.2061699
Show Author Affiliations
Toni Saastamoinen, Univ. of Eastern Finland (Finland)
Hannu Husu, Ctr. for Metrology and Accreditation (Finland)
Janne Laukkanen, Univ. of Eastern Finland (Finland)
Samuli Siitonen, Nanocomp Oy Ltd. (Finland)
Jari Turunen, Univ. of Eastern Finland (Finland)
Antti Lassila, Ctr. for Metrology and Accreditation (Finland)


Published in SPIE Proceedings Vol. 9173:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
Michael T. Postek, Editor(s)

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