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Proceedings Paper

Analysis of optimization method for interferometric evaluation of small shape deviations
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Paper Abstract

This work is focused on a description and an analysis of an optimization method for the evaluation of small deviations of optical surface shape in interferometric testing. The proposed method does not require a detailed analysis of the interference field as it is necessary with classical evaluation methods of interference patterns and it uses the optimization techniques for the determination of the deviation of the tested surface from its nominal shape. This method compares interferograms, which correspond to the nominal shape of optical surfaces, and interferograms of the tested optical surfaces using the suitable merit function based on variance of two interference patterns. It can be used for the comparison of two surface shapes.

Paper Details

Date Published: 18 August 2014
PDF: 10 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920312 (18 August 2014); doi: 10.1117/12.2061001
Show Author Affiliations
Jiří Novák, Czech Technical Univ. in Prague (Czech Republic)
Pavel Novák, Czech Technical Univ. in Prague (Czech Republic)
Antonin Mikš, Czech Technical Univ. in Prague (Czech Republic)


Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)

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