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Proceedings Paper

Progress towards a MEMS tunable infrared filter using porous silicon
Author(s): Dmitry A. Kozak; Todd Stievater; Marcel Pruessner; William Rabinovich
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Paper Abstract

The unique optical properties of porous silicon show it to be a promising material for imaging and spectroscopy in the mid-infrared and long-infrared wavelength ranges. A tunable MEMS filter using porous silicon as a high-reflectivity layer is proposed. Measurements on fabricated porous silicon-based distributed Bragg reflectors and Fabry-Perot etalons are presented.

Paper Details

Date Published: 28 August 2014
PDF: 8 pages
Proc. SPIE 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91700C (28 August 2014); doi: 10.1117/12.2060925
Show Author Affiliations
Dmitry A. Kozak, National Research Council (United States)
Todd Stievater, U.S. Naval Research Lab. (United States)
Marcel Pruessner, U.S. Naval Research Lab. (United States)
William Rabinovich, U.S. Naval Research Lab. (United States)


Published in SPIE Proceedings Vol. 9170:
Nanoengineering: Fabrication, Properties, Optics, and Devices XI
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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