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Proceedings Paper

Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectromicroscopy
Author(s): S. Matsuyama; Y. Emi; H. Kino; Y. Kohmura; M. Yabashi; T. Ishikawa; K. Yamauchi
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Paper Abstract

An achromatic and high-resolution hard X-ray microscope was developed, in which advanced Kirkpatrick-Baez mirror optics with four total-reflection mirrors was employed as an objective. A fine test pattern with a 100 nm feature size could successfully be resolved. Full-field imaging, in combination with X-ray absorption near edge structure (XANES) spectroscopy, was used to characterize tungsten particles. XANES spectra were obtained over the entire observation area, showing good agreement with the XANES spectrum of pure tungsten.

Paper Details

Date Published: 5 September 2014
PDF: 7 pages
Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 92070Q (5 September 2014); doi: 10.1117/12.2060783
Show Author Affiliations
S. Matsuyama, Osaka Univ. (Japan)
Y. Emi, Osaka Univ. (Japan)
H. Kino, Osaka Univ. (Japan)
Y. Kohmura, RIKEN (Japan)
M. Yabashi, RIKEN (Japan)
T. Ishikawa, RIKEN (Japan)
K. Yamauchi, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 9207:
Advances in X-Ray/EUV Optics and Components IX
Christian Morawe; Ali M. Khounsary; Shunji Goto, Editor(s)

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