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Proceedings Paper

A compact in-situ ellipsometer using the liquid crystal variable retarder
Author(s): Wen-Tse Shih; Mei-Li Hsieh; Yu Faye Chao
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Paper Abstract

For monitoring the optical properties of material under a dynamical processing, we design a compact in-situ ellipsometry by using a liquid crystal (LC) phase retarder. Since the key issue of an accurate ellipsometer is the alignment of each optical component in the system, hence we not only proposed the alignment procedure, we also calibrated the phase retardation of LC retarder for this in-situ ellipsometry. The azimuths of polarizers and phase retarders can be aligned by the analytical solutions of the azimuthal deviations. The phase retardation can be directly determined by the intensity ratio technique.

Paper Details

Date Published: 5 September 2014
PDF: 7 pages
Proc. SPIE 9200, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII, 920009 (5 September 2014); doi: 10.1117/12.2060567
Show Author Affiliations
Wen-Tse Shih, Minghsin Univ. of Science and Technology (Taiwan)
Mei-Li Hsieh, National Chiao Tung Univ. (Taiwan)
Yu Faye Chao, National Chiao Tung Univ. (Taiwan)


Published in SPIE Proceedings Vol. 9200:
Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII
Shizhuo Yin; Ruyan Guo, Editor(s)

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