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Proceedings Paper

10 x 10 cm2 aperture x-ray preionized discharge-pumped KrF excimer laser
Author(s): Hakaru Mizoguchi; Akira Endo; Jayden N. Jethwa; Fritz P. Schaefer
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Paper Abstract

A 10 x 10 cm2 aperture X-ray preionized discharge-pumped KrF excimer laser has been constructed. A fast water pulse forming line is discharged via a rail-gap switch into the laser chamber. Collimated X-ray preionization ensures a wide and uniform discharge. The laser pulse energy exceeds 4.7 J in a pulse of 28 ns (FWHM). The active beam cross-section obtained to date is approx. 10 x 8 cm2.

Paper Details

Date Published: 1 August 1990
PDF: 8 pages
Proc. SPIE 1278, Excimer Lasers and Applications II, (1 August 1990); doi: 10.1117/12.20605
Show Author Affiliations
Hakaru Mizoguchi, Max-Planck-Institut fuer Biophysikalische Chemie (Japan)
Akira Endo, Max-Planck-Institut fuer Biophysikalische Chemie (Japan)
Jayden N. Jethwa, Max-Planck-Institut fuer Biophysikalische Chemie (Germany)
Fritz P. Schaefer, Max-Planck-Institut fuer Biophysikalische Chemie (Germany)

Published in SPIE Proceedings Vol. 1278:
Excimer Lasers and Applications II
Tommaso Letardi, Editor(s)

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