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Proceedings Paper

Spectrally narrowed lasing of a self-injection KrF excimer laser
Author(s): Yasuhiro Shimada; Koichi Wani; Tadaaki Miki; Hidehito Kawahara; Mutsumi Mimasu; Yoshiro Ogata
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Paper Abstract

Spectrally nantwed lasing of a KrF excimer laser has teen ahieved by a self-injection technique using abeam splitter for power extraction aixi intravity etalons for spectral-narrowing. The laser cavity is divithi into an amplifying branch aix! a spectralnarrowing branch. The spectral bandwidth was narrowed to <3pm FWHM with air-sed etalons placed in the spectral-narrowing branch. A laser propagation model was intrOdUced for describing the laser intensity traveling in the laser cavity. The calculated intensityincident onthe intracavityetalons wassmaller thanthat in theconventional Fabry-Perotcavity withplane-parallel mirrors.

Paper Details

Date Published: 1 August 1990
PDF: 5 pages
Proc. SPIE 1278, Excimer Lasers and Applications II, (1 August 1990); doi: 10.1117/12.20603
Show Author Affiliations
Yasuhiro Shimada, Matsushita Electronics Corp. (Japan)
Koichi Wani, Matsushita Electronics Corp. (Japan)
Tadaaki Miki, Matsushita Electronics Corp. (Japan)
Hidehito Kawahara, Matsushita Electronics Corp. (Japan)
Mutsumi Mimasu, Matsushita Electronics Corp. (Japan)
Yoshiro Ogata, Matsushita Electronics Corp. (Japan)

Published in SPIE Proceedings Vol. 1278:
Excimer Lasers and Applications II
Tommaso Letardi, Editor(s)

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