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Proceedings Paper

Excimer laser of extremely homogeneous UV spark preionization
Author(s): Arnold A. Vill; Ants A. Salk
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Paper Abstract

The positive role of preionization in performance and characteristics of excimer lasers is unquestionable. A brilliant confirmance of it is the work of Taylor1 , in which phenomena, which havn't yet found their' theorist, are described. A designer of concrete instruments must follow one empiric rule: preionization must be as powerful as possible and maximally homogeneous. The discharge being most crucial of to gradients of density of electrons of preionization across the field. It's no wonder, that the best results were obtained when using exloying X-rays for exposition of discharge gap. But X-ray sources are complicated and require good tech- nology of performance, that's why most designers are have recourse to UV preionization either from spark sources, or from surface dis- charge.

Paper Details

Date Published: 1 August 1990
PDF: 7 pages
Proc. SPIE 1278, Excimer Lasers and Applications II, (1 August 1990); doi: 10.1117/12.20602
Show Author Affiliations
Arnold A. Vill, Special Design Office (Estonia)
Ants A. Salk, Special Design Office (Estonia)


Published in SPIE Proceedings Vol. 1278:
Excimer Lasers and Applications II
Tommaso Letardi, Editor(s)

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