Share Email Print
cover

Proceedings Paper

Optical fiber Fabry-Pérot sensor fabrication based on focused ion beam post-processing
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A combination of focused ion beam milling and chemical etching is proposed for the creation of Fabry-Pérot cavities in microwires. Both simple cavities and cantilevers are created on 15 μm-diameter microwires and characterized in temperature. The cantilever structure shows sensitivity to vibration and is capable of measuring frequencies in the range 1 Hz – 40 kHz.

Paper Details

Date Published: 2 June 2014
PDF: 4 pages
Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors, 91577T (2 June 2014); doi: 10.1117/12.2059175
Show Author Affiliations
Ricardo M. Andre, INESC Porto (Portugal)
Univ. do Porto (Portugal)
Institut für Photonische Technologien e.V. (Germany)
Simon Pevec, Univ. of Maribor (Slovenia)
Martin Becker, Institut für Photonische Technologien e.V. (Germany)
Jan Dellith, Institut für Photonische Technologien e.V. (Germany)
Manfred Rothhardt, Institut für Photonische Technologien e.V. (Germany)
Manuel B. Marques, INESC Porto (Portugal)
Univ. do Porto (Portugal)
Denis Donlagic, Univ. of Maribor (Slovenia)
Hartmut Bartelt, Institut für Photonische Technologien e.V. (Germany)
Orlando Frazão, INESC Porto (Portugal)
Univ. do Porto (Portugal)


Published in SPIE Proceedings Vol. 9157:
23rd International Conference on Optical Fibre Sensors
José M. López-Higuera; Julian D. C. Jones; Manuel López-Amo; José Luis Santos, Editor(s)

© SPIE. Terms of Use
Back to Top