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Proceedings Paper

Tactile MEMS-based sensor for delicate microsurgery
Author(s): Young Soo Park; Wooho Lee; Nachappa Gopalsami; Mohan Gundeti
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Paper Abstract

This paper presents development of a new MEMS-based tactile microsensor to replicate the delicate sense of touch in robotic surgery. Using an epoxy-based photoresist, SU-8, as substrate, the piezoresistive type sensor is flexible, robust, and easy to fabricate in mass. Sensor characteristic tests indicate adequate sensitivity and linearity, and the multiple sensor elements can match full range of surgical tissue stiffness. Such characteristic nearly match the most delicate sense of touch at the human fingertip. It is expected such a sensor is essential for delicate surgeries, such as handling delicate tissues and microsurgery.

Paper Details

Date Published: 5 June 2014
PDF: 11 pages
Proc. SPIE 9116, Next-Generation Robots and Systems, 911603 (5 June 2014); doi: 10.1117/12.2058250
Show Author Affiliations
Young Soo Park, Argonne National Lab. (United States)
Wooho Lee, The Univ. of Texas at Arlington (United States)
Nachappa Gopalsami, Argonne National Lab. (United States)
Mohan Gundeti, The Univ. of Chicago Medical Ctr. (United States)


Published in SPIE Proceedings Vol. 9116:
Next-Generation Robots and Systems
Dan O. Popa; Muthu B. J. Wijesundara, Editor(s)

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