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Proceedings Paper

Superlattice-doped silicon detectors: progress and prospects
Author(s): Michael E. Hoenk; Shouleh Nikzad; Alexander G. Carver; Todd J. Jones; John Hennessy; April D. Jewell; Joseph Sgro; Shraga Tsur; Mickel McClish; Richard Farrell
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Paper Abstract

In this paper we review the physics and performance of silicon detectors passivated with wafer-scale molecular beam epitaxy (MBE) and atomic layer deposition (ALD). MBE growth of a two-dimensional (2D) doping superlattice on backside-illuminated (BSI) detectors provides nearly perfect protection from interface traps, even at trap densities in excess of 1014 cm-2. Superlattice-doped, BSI CMOS imaging detectors show no measurable degradation of quantum efficiency or dark current from long-term exposure to pulsed DUV lasers. Wafer-scale superlattice-doping has been used to passivate CMOS and CCD imaging arrays, fully-depleted CCDs and photodiodes, and large-area avalanche photodiodes. Superlattice-doped CCDs with ALD-grown antireflection coatings achieved world record quantum efficiency at deep and far ultraviolet wavelengths (100-300nm). Recently we have demonstrated solar-blind, superlattice doped avalanche photodiodes using integrated metal-dielectric coatings to achieve selective detection of ultraviolet light in the 200-250 nm spectral range with high out-of-band rejection.

Paper Details

Date Published: 30 July 2014
PDF: 13 pages
Proc. SPIE 9154, High Energy, Optical, and Infrared Detectors for Astronomy VI, 915413 (30 July 2014); doi: 10.1117/12.2057678
Show Author Affiliations
Michael E. Hoenk, Jet Propulsion Lab. (United States)
Shouleh Nikzad, Jet Propulsion Lab. (United States)
Alexander G. Carver, Jet Propulsion Lab. (United States)
Todd J. Jones, Jet Propulsion Lab. (United States)
John Hennessy, Jet Propulsion Lab. (United States)
April D. Jewell, Jet Propulsion Lab. (United States)
Joseph Sgro, Alacron, Inc. (United States)
Shraga Tsur, Applied Materials, Inc. (Israel)
Mickel McClish, Radiation Monitoring Devices, Inc. (United States)
Richard Farrell, Radiation Monitoring Devices, Inc. (United States)

Published in SPIE Proceedings Vol. 9154:
High Energy, Optical, and Infrared Detectors for Astronomy VI
Andrew D. Holland; James Beletic, Editor(s)

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