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Proceedings Paper

Progress in the specification of optical instruments for the measurement of surface form and texture
Author(s): Peter J. de Groot
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Paper Abstract

Specifications for confocal microscopes, optical interferometers and other methods of measuring areal surface topography can be confusing and misleading. The emerging ISO 25178 standards, together with the established international vocabulary of metrology, provide a foundation for improved specifications for 3D surface metrology instrumentation. The approach in this paper links instrument specifications to metrological characteristics that can influence a measurement, using consistent definitions of terms, and reference to verification procedures.

Paper Details

Date Published: 28 May 2014
PDF: 12 pages
Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100M (28 May 2014); doi: 10.1117/12.2054435
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 9110:
Dimensional Optical Metrology and Inspection for Practical Applications III
Kevin G. Harding; Toru Yoshizawa, Editor(s)

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