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Proceedings Paper

Study on the fabrication and releasing of sacrificial layer of micro-cantilever
Author(s): Liang Liu; Weiguo Liu; Huan Liu
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Paper Abstract

Polyimide is used as sacrificial layer material during the research on bi-material micro-cantilever structure. Contrasted with other sacrificial layer materials, polyimide is marked with excellent properties, like good insulation, big coefficient of elasticity, big coefficient of linear expansion and outstanding mechanical property. This dissertation has studied the preparing process of sacrificial layer, like sacrificial layer imaging and solidifying, and different methods to release sacrificial layer and how to control all kinds of parameters to obtain the best suspension. Finally, the optimized process parameters are obtained.

Paper Details

Date Published: 16 December 2013
PDF: 5 pages
Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90680V (16 December 2013); doi: 10.1117/12.2054012
Show Author Affiliations
Liang Liu, Xi'an Technological Univ. (China)
Weiguo Liu, Xi'an Technological Univ. (China)
Huan Liu, Xi'an Technological Univ. (China)

Published in SPIE Proceedings Vol. 9068:
Eighth International Conference on Thin Film Physics and Applications
Junhao Chu; Chunrui Wang, Editor(s)

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