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Proceedings Paper

Low-dark current 1024x1280 InGaAs PIN arrays
Author(s): Ping Yuan; James Chang; Joseph C. Boisvert; Nasser Karam
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Paper Abstract

Photon counting imaging applications requires low noise from both detector and readout integrated circuit (ROIC) arrays. In order to retain the photon-counting-level sensitivity, a long integration time has to be employed and the dark current has to be minimized. It is well known that the PIN dark current is sensitive to temperature and a dark current density of 0.5 nA/cm2 was demonstrated at 7 °C previously. In order to restrain the size, weight, and power consumption (SWaP) of cameras for persistent large-area surveillance on small platforms, it is critical to develop large format PIN arrays with small pitch and low dark current density at higher operation temperatures. Recently Spectrolab has grown, fabricated and tested 1024x1280 InGaAs PIN arrays with 12.5 μm pitch and achieved 0.7 nA/cm2 dark current density at 15 °C. Based on our previous low-dark-current PIN designs, the improvements were focused on 1) the epitaxial material design and growth control; and 2) PIN device structure to minimize the perimeter leakage current and junction diffusion current. We will present characterization data and analyses that illustrate the contribution of various dark current mechanisms.

Paper Details

Date Published: 24 June 2014
PDF: 6 pages
Proc. SPIE 9070, Infrared Technology and Applications XL, 907007 (24 June 2014); doi: 10.1117/12.2053999
Show Author Affiliations
Ping Yuan, Spectrolab, Inc. (United States)
James Chang, Spectrolab, Inc. (United States)
Joseph C. Boisvert, Spectrolab, Inc. (United States)
Nasser Karam, Spectrolab, Inc. (United States)

Published in SPIE Proceedings Vol. 9070:
Infrared Technology and Applications XL
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton, Editor(s)

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