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Proceedings Paper • Open Access

Front Matter: Volume 9051
Author(s): Proceedings of SPIE

Paper Abstract

This PDF file contains the front matter associated with SPIE Proceedings Volume 9051, including the Title Page, Copyright information, Table of Contents, Invited Panel Discussion, and Conference Committee listing.

Paper Details

Date Published: 14 April 2014
PDF: 14 pages
Proc. SPIE 9051, Advances in Patterning Materials and Processes XXXI, 905101 (14 April 2014); doi: 10.1117/12.2053822
Show Author Affiliations
Proceedings of SPIE, SPIE (United States)


Published in SPIE Proceedings Vol. 9051:
Advances in Patterning Materials and Processes XXXI
Thomas I. Wallow; Christoph K. Hohle, Editor(s)

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