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Proceedings Paper

Full-field step profile measurement with sinusoidal wavelength scanning interferometer
Author(s): Samuel Choi; Osami Sasaki; Takamasa Suzuki
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Paper Abstract

A sinusoidal wavelength scanning interferometer is proposed for 3-D profile measurement. The interference phase-shift signal generated by the sinusoidal wavelength scanning contains information of optical path difference (OPD) covering nm-mm scale structure. The interference phase-shift signal was obtained by the four-step phase shifting method. The sinusoidal wavelength shifting bandwidth of 5.7 nm with a frequency of approximately 180 Hz was performed by the Littman-Metcalf external resonator-type tunable laser with a center of 772.1 nm. The full-field step-height surface profile measurement and 3-D surface measurement were conducted by a CCD image sensor with an accuracy of few tens nm. The surface profile of gauge blocks with a step-height of up to 10 μm was successfully measured.

Paper Details

Date Published: 28 May 2014
PDF: 6 pages
Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100F (28 May 2014); doi: 10.1117/12.2053539
Show Author Affiliations
Samuel Choi, Niigata Univ. (Japan)
Osami Sasaki, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 9110:
Dimensional Optical Metrology and Inspection for Practical Applications III
Kevin G. Harding; Toru Yoshizawa, Editor(s)

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