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Proceedings Paper

Metrology tool for fast measurement of patterned sapphire substrate used in LED manufacturing
Author(s): Joanna Schmit; Son Bui; Oh-Kyu Kwon; Dong Chen
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Paper Abstract

Increasing demand for high-brightness (HB) LEDs is prompting manufacturers to refine production methods and improve performance of LED light sources. Achieving either of these requires high precision metrology tools that are also fast and non-destructive. In particular, there is a need for the metrology for patterned sapphire substrates (PSS) used in LED manufacturing to enhance light-extraction efficiency. This article describes a gauge-capable metrology tool that is currently used for these purposes: the 3D optical microscope based on white-light interferometer (WLI) which with special algorithms for fringe analysis can specifically quantify the height, width and pitch for each individual PSS structure. We have measured a variety of structures and their dimensions and compared them to SEM or AFM results. The white-light interferometer (WLI) is a tool that better meets the needs of these applications because of the ease of its full field measurement and for faster defects detection. 3D optical microscopes also provide excellent repeatability, especially when employing the automated position calibration of the reference mirror position in the interferometric objective.

Paper Details

Date Published: 28 May 2014
PDF: 8 pages
Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100N (28 May 2014); doi: 10.1117/12.2053485
Show Author Affiliations
Joanna Schmit, Bruker Inc. (United States)
Son Bui, Bruker Inc. (United States)
Oh-Kyu Kwon, Bruker Inc. (United States)
Dong Chen, Bruker Inc. (United States)

Published in SPIE Proceedings Vol. 9110:
Dimensional Optical Metrology and Inspection for Practical Applications III
Kevin G. Harding; Toru Yoshizawa, Editor(s)

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