In this work, we report an observation of process of local destruction monocrystalline silicon with a scanning beam irradiation of pulse ytterbium fiber laser with a wavelength λ= 1062 nm, accompanied by the oxidation of ablation microparticles. It is shown that depending on the power density of irradiation was observed a large scatter size of the microparticles. From a certain average power density is observed beginning oxidation particulate emitted from the surface of the irradiated area. By varying the parameters of the laser beam such as scanning speed, pulse repetition rate, overlap of laser spot, radiation dose can be achieved almost complete oxidation of all formed during the ablation of microparticles.

Date Published: 28 November 2013
PDF: 5 pages
Proc. SPIE 9065, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013, 90650U (28 November 2013); doi: 10.1117/12.2053272

Published in SPIE Proceedings Vol. 9065:
Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013
Vadim P. Veiko; Tigran A. Vartanyan, Editor(s)