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Proceedings Paper

The peculiarities of local laser oxidation of metal films
Author(s): Dmitrii A. Sinev; Elena A. Shakhno; Andrew M. Kulazhkin; Vera A. Kochetova; Andrey D. Kochetov
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Paper Abstract

Laser-applied thermochemical modification of thin metal films is the basement for perspective technology writing the submicron structures. Using the materials that are produce the transparent oxides layers during the heating should be perspective for to increase the resolution of this technology, but a detailed study about dependence of the oxidation process on the dynamics of the optical characteristics should be made at first. This article presents an attempt for to creation a new theoretical model, which allows showing in dynamics the process of metal film oxidation by laser pulses.

Paper Details

Date Published: 28 November 2013
PDF: 5 pages
Proc. SPIE 9065, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013, 90650N (28 November 2013); doi: 10.1117/12.2053256
Show Author Affiliations
Dmitrii A. Sinev, National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)
Elena A. Shakhno, National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)
Andrew M. Kulazhkin, National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)
Vera A. Kochetova, National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)
Andrey D. Kochetov, National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)


Published in SPIE Proceedings Vol. 9065:
Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013
Vadim P. Veiko; Tigran A. Vartanyan, Editor(s)

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