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Proceedings Paper

Modeling of thin Cr film oxidation under the action of ultrashort laser pulses
Author(s): E. B. Yakovlev; O. N Sergaeva; V. V. Svirina; M. V. Yarchuk
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Paper Abstract

The paper is devoted to modeling of thin metallic film on a glass substrate oxidation under the action of ultrashort laser pulse sequence with taking into account surface and bulk oxidation and electronic excitation.

Paper Details

Date Published: 28 November 2013
PDF: 6 pages
Proc. SPIE 9065, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013, 906509 (28 November 2013); doi: 10.1117/12.2053178
Show Author Affiliations
E. B. Yakovlev, National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)
O. N Sergaeva, National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)
V. V. Svirina, National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)
M. V. Yarchuk, National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)


Published in SPIE Proceedings Vol. 9065:
Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013
Vadim P. Veiko; Tigran A. Vartanyan, Editor(s)

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