Share Email Print
cover

Proceedings Paper

An optically resonant position read-out system for MEMS gas sensors
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We present an experimental demonstration of a novel, integrated readout approach for measuring the suspended height of micro-electro-mechanical systems (MEMS) structures. The approach is based on creating a resonant optical cavity between the suspended MEMS structure and the substrate that the MEMS structure is anchored to. The resulting interferometric effect causes modulation of an optical laser signal which is strongly dependent on the position of the MEMS device.

Paper Details

Date Published: 25 June 2014
PDF: 7 pages
Proc. SPIE 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI, 90832X (25 June 2014); doi: 10.1117/12.2053135
Show Author Affiliations
Gino Putrino, The Univ. of Western Australia (Australia)
Adrian Keating, The Univ. of Western Australia (Australia)
Mariusz Martyniuk, The Univ. of Western Australia (Australia)
Lorenzo Faraone, The Univ. of Western Australia (Australia)
John M. Dell, The Univ. of Western Australia (Australia)


Published in SPIE Proceedings Vol. 9083:
Micro- and Nanotechnology Sensors, Systems, and Applications VI
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

© SPIE. Terms of Use
Back to Top