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Proceedings Paper

Displacement measurement with intracavity interferometry
Author(s): Josef Lazar; Miroslava Holá; Antonín Fejfar; Jiří Stuchlík; Jan Kočka; Jindřich Oulehla; Ondřej Číp
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Paper Abstract

We present a measuring technique for displacement and position sensing over a limited range with detection of standingwave pattern inside of a passive Fabry-Perot cavity. The concept considers locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows to stabilize wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneities. Sensing of the interference maxima and minima within the cavity along the beam axis has been tested and proven with a low loss photoresistive photodetector based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.

Paper Details

Date Published: 1 May 2014
PDF: 6 pages
Proc. SPIE 9132, Optical Micro- and Nanometrology V, 913210 (1 May 2014); doi: 10.1117/12.2052923
Show Author Affiliations
Josef Lazar, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Miroslava Holá, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Antonín Fejfar, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Jiří Stuchlík, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Jan Kočka, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Jindřich Oulehla, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Ondřej Číp, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 9132:
Optical Micro- and Nanometrology V
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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