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Proceedings Paper

In-beam tracking refractometry for coordinate interferometric measurement
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Paper Abstract

We propose to extend the principle of compensation of the fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. The concept is derived form a tracking refractometry evaluating the refractive index of air in the beam axis coinciding with the positioning interferometer. Application of this approach in multi-axis positioning and measurement mans to compromise the principle of spatial unity of the displacement measuring laser beam and the beam of the tracking refractometer. In this contribution we evaluate the level of uncertainty associated with the spatial shift of these two beams. Consequently the nature of the fluctuations of the refractive index of air in laser interferometry is investigated and discussed with the focus on potential applications in coordinate measuring systems and long-range metrological scanning probe microscopy systems.

Paper Details

Date Published: 1 May 2014
PDF: 7 pages
Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91321K (1 May 2014); doi: 10.1117/12.2052920
Show Author Affiliations
Miroslava Holá, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Josef Lazar, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Ondřej Číp, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Zdeněk Buchta, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 9132:
Optical Micro- and Nanometrology V
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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