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Proceedings Paper

Tilt angle measurement with a Gaussian-shaped laser beam tracking
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Paper Abstract

We have addressed the challenge to carry out the angular tilt stabilization of a laser guiding mirror which is intended to route a laser beam with a high energy density. Such an application requires good angular accuracy as well as large operating range, long term stability and absolute positioning. We have designed an instrument for such a high precision angular tilt measurement based on a triangulation method where a laser beam with Gaussian profile is reflected off the stabilized mirror and detected by an image sensor. As the angular deflection of the mirror causes a change of the beam spot position, the principal task is to measure the position on the image chip surface. We have employed a numerical analysis of the Gaussian intensity pattern which uses the nonlinear regression algorithm. The feasibility and performance of the method were tested by numeric modeling as well as experimentally. The experimental results indicate that the assembled instrument achieves a measurement error of 0.13 microradian in the range ±0.65 degrees over the period of one hour. This corresponds to the dynamic range of 1:170 000.

Paper Details

Date Published: 1 May 2014
PDF: 6 pages
Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91321E (1 May 2014); doi: 10.1117/12.2052880
Show Author Affiliations
Martin Šarbort, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Šimon Řeřucha, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Petr Jedlička, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Josef Lazar, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Ondrej Číp, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 9132:
Optical Micro- and Nanometrology V
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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