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Proceedings Paper

AZO electrodes deposited by atomic layer deposition for OLED fabrication
Author(s): B. Dugrenil; I. Séguy; Hsin-Ying Lee; T. Camps; Y.-C. Lin; J. B. Doucet; Y.-S. Chiu; L. Salvagnac; E. Bedel-Pereira; M. Ternisien; C. T. Lee; V. Bardinal
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Paper Abstract

In this work, we present a comparative study of optimized AZO electrodes deposited by Atomic Layer Deposition (ALD) with commercial ITO in terms of electrical, optical and structural properties. Despite a lower figure of merit mainly due to a higher sheet resistance, AZO-based OLEDs are shown to present a current density five times higher than ITO-based ones for the same applied voltage. These AZO electrodes fabricated by ALD could thus be promising substitutes for conventional ITO anodes in organic electronic devices.

Paper Details

Date Published: 1 May 2014
PDF: 6 pages
Proc. SPIE 9137, Organic Photonics VI, 91371D (1 May 2014); doi: 10.1117/12.2052504
Show Author Affiliations
B. Dugrenil, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
I. Séguy, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
Hsin-Ying Lee, National Cheng Kung Univ. (Taiwan)
T. Camps, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
Y.-C. Lin, National Cheng Kung Univ. (Taiwan)
J. B. Doucet, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
Y.-S. Chiu, National Cheng Kung Univ. (Taiwan)
L. Salvagnac, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
E. Bedel-Pereira, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)
M. Ternisien, Univ. Paul Sabatier (France)
C. T. Lee, National Cheng Kung Univ. (Taiwan)
V. Bardinal, Lab. d'Analyse et d'Architecture des Systèmes, CNRS, Univ. de Toulouse (France)


Published in SPIE Proceedings Vol. 9137:
Organic Photonics VI
Barry P. Rand; Chihaya Adachi; David Cheyns; Volker van Elsbergen, Editor(s)

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