Share Email Print

Proceedings Paper

Laser-induced damage in photopolymers thin films with ultrashort pulses
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We characterize laser-induced damage threshold (LIDT) in transparent photopolymers by a sub-ps laser pulses of 515 nm wavelength representing case of high light intensities. Five different photopolymers (SZ2080, OrmoComp, SU-8, PDMS and PMMA) widely used in the laser lithography are investigated. The relationship of the damage threshold and optical band-gap energy of the polymers indicating possible damage mechanism is considered. Incubation model validating damage threshold dependence on the number of laser pulses is studied as well. The obtained characteristic values of LIDT reveal potential of photopolymers and their possible applications in high power laser systems.

Paper Details

Date Published: 2 May 2014
PDF: 8 pages
Proc. SPIE 9130, Micro-Optics 2014, 913013 (2 May 2014); doi: 10.1117/12.2051984
Show Author Affiliations
Albertas Žukauskas, Vilnius Univ. (Lithuania)
Gintarė Batavičiūtė, Vilnius Univ. (Lithuania)
Mindaugas Ščiuka, Vilnius Univ. (Lithuania)
Andrius Melninkaitis, Vilnius Univ. (Lithuania)
Mangirdas Malinauskas, Vilnius Univ. (Lithuania)

Published in SPIE Proceedings Vol. 9130:
Micro-Optics 2014
Hugo Thienpont; Jürgen Mohr; Hans Zappe; Hirochika Nakajima, Editor(s)

© SPIE. Terms of Use
Back to Top