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Proceedings Paper

Ray-based calibration for the micro optical metrology system
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Paper Abstract

Fringe projection 3D microscopy (FP-3DM) plays an important role in micro-machining and micro-fabrication. FP-3DM may be realized with quite different arrangements and principles, which make people confused to select an appropriate one for their specific application. This paper introduces the ray-based general imaging model to describe the FP-3DM, which has the potential to get a unified expression for different system arrangements. Meanwhile the dedicated calibration procedure is also presented to realize quantitative 3D imaging. The validity and accuracy of proposed calibration approach is demonstrated with experiments.

Paper Details

Date Published: 1 May 2014
PDF: 7 pages
Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91320K (1 May 2014); doi: 10.1117/12.2051918
Show Author Affiliations
Yongkai Yin, Shenzhen Univ. (China)
Meng Wang, Shenzhen Univ. (China)
Ameng Li, Shenzhen Univ. (China)
Xiaoli Liu, Shenzhen Univ. (China)
Xiang Peng, Shenzhen Univ. (China)

Published in SPIE Proceedings Vol. 9132:
Optical Micro- and Nanometrology V
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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