Proceedings PaperLow-pressure deposition of diamond thin films
|Format||Member Price||Non-Member Price|
|GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free.||Check Access|
The fundamental possibifity to synthesize diamond under low pressure from the gas phase as a metastable carbon allotrope is known nearly as long as the high pressure route to this valuable material. Nevertheless more than twenty years elapsed, befoie research activities were started world-wide aiming atthe development ofdepositionprocesses meeting the demands of technical applications. In this review the present state ofthis work will be surveyed, with an emphasis on those topics which are of critical importance for an eventual success of a diamond technology: Scale-up of deposition processes, low temperature deposition, heteroepitaxy and control ofnucleation, mechanical adhesion, and electrical properties ofdiamond films.