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Proceedings Paper

Low-pressure deposition of diamond thin films
Author(s): Claus-Peter Klages
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Paper Abstract

The fundamental possibifity to synthesize diamond under low pressure from the gas phase as a metastable carbon allotrope is known nearly as long as the high pressure route to this valuable material. Nevertheless more than twenty years elapsed, befoie research activities were started world-wide aiming atthe development ofdepositionprocesses meeting the demands of technical applications. In this review the present state ofthis work will be surveyed, with an emphasis on those topics which are of critical importance for an eventual success of a diamond technology: Scale-up of deposition processes, low temperature deposition, heteroepitaxy and control ofnucleation, mechanical adhesion, and electrical properties ofdiamond films.

Paper Details

Date Published: 1 August 1990
PDF: 7 pages
Proc. SPIE 1275, Hard Materials in Optics, (1 August 1990); doi: 10.1117/12.20518
Show Author Affiliations
Claus-Peter Klages, Philips GmbH (Germany)


Published in SPIE Proceedings Vol. 1275:
Hard Materials in Optics
Carl-Gustaf Ribbing, Editor(s)

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