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Proceedings Paper

Fabrication and performance of uncooled infrared bolometer based on Mn1.56Co0.96Ni0.48O4 thin films
Author(s): Ouyang Cheng; Wei Zhou; Jing Wu; Junhao Chu; Zhiming Huang
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Paper Abstract

Mn-Co-Ni-O bolometer with spinel structure has been extensively studied as a low resistivity and high sensitivity negative temperature coefficient material for decades. In this paper, the fabrication process and the performance of uncooled infrared bolometer based on Mn1.56Co0.96Ni0.48O4 (MCNO) thin films grown on Al2O3 substrate by chemical solution deposition were investigated. The MCNO bolometer sized 300×160 μm2 were fabricated by photolithography process followed by wet etching, and the temperature coefficient of resistance reaches -3.81 %K-1 @296 K. Relatively low excess noise was achieved due to the good quality of fabrication process, and the normalized noise power γ/n was found to be 1.8×10-21 cm3 at 296 K. Through black coating the performances for MCNO bolometer, operating at room temperature, are greatly improved and exhibit responsivity of over 354 V/W, detectivity of approximated 4.5×107 cmHz1/2/W@10Hz at ±16 V, and the thermal time constant of about 18 ms. These experiment results indicate that the infrared detection ability of MCNO thin film bolometer is significantly enhanced comparing with bulk devices.

Paper Details

Date Published: 16 December 2013
PDF: 6 pages
Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90681K (16 December 2013); doi: 10.1117/12.2051725
Show Author Affiliations
Ouyang Cheng, Shanghai Institute of Technical Physics (China)
Wei Zhou, Shanghai Institute of Technical Physics (China)
Jing Wu, Shanghai Institute of Technical Physics (China)
Junhao Chu, Shanghai Institute of Technical Physics (China)
Zhiming Huang, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 9068:
Eighth International Conference on Thin Film Physics and Applications
Junhao Chu; Chunrui Wang, Editor(s)

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