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Proceedings Paper

High-performance flexible microwave passives on plastic
Author(s): Zhenqiang Ma; Jung-Hun Seo; Sang June Cho; Weidong Zhou
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Paper Abstract

We report the demonstration of bendable inductors, capacitors and switches fabricated on a polyethylene terephthalate (PET) substrate that can operate at high microwave frequencies. By employing bendable dielectric and single crystalline semiconductor materials, spiral inductors and metal-insulator-metal (MIM) capacitors with high quality factors and high resonance frequencies and single-pole, single-throw (SPST) switches were archived. The effects of mechanical bending on the performance of inductors, capacitors and switches were also measured and analyzed. We further investigated the highest possible resonance frequencies and quality factors of inductors and capacitors and, high frequency responses and insertion loss. These demonstrations will lead to flexible radio-frequency and microwave systems in the future.

Paper Details

Date Published: 4 June 2014
PDF: 7 pages
Proc. SPIE 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI, 90831I (4 June 2014); doi: 10.1117/12.2051700
Show Author Affiliations
Zhenqiang Ma, Univ. of Wisconsin-Madison (United States)
Jung-Hun Seo, Univ. of Wisconsin-Madison (United States)
Sang June Cho, Univ. of Wisconsin-Madison (United States)
Weidong Zhou, The Univ. of Texas at Arlington (United States)

Published in SPIE Proceedings Vol. 9083:
Micro- and Nanotechnology Sensors, Systems, and Applications VI
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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