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Proceedings Paper

Preparation and mechanical properties of a-C:H films
Author(s): Xin Jiang; Klaus Reichelt; Bernd Stritzker
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Paper Abstract

Diamondlike a-C:H films have been deposited by decomposition of acetylene. By the combination of Brillouin scattering and the ultralow load indentation technique, the following mechanical properties of the films were studied: the microhardness, H, the Young's modulus, E, the shear modulus, Ii , and the Poisson's ratio, v. From the measured data of mass density, hydrogen concentration and the ratio of sp3/sp2 bonds the f illing factors of these films were calculated. The results show that the hardness,Young's modulus and shear modulus of these films depend stongly on the volume concentration of voids and are directly proportional to the filling factor.

Paper Details

Date Published: 1 August 1990
PDF: 7 pages
Proc. SPIE 1275, Hard Materials in Optics, (1 August 1990); doi: 10.1117/12.20516
Show Author Affiliations
Xin Jiang, Institut fuer Schicht- und Ion (Germany)
Klaus Reichelt, Institut fuer Schicht- und Ion (Germany)
Bernd Stritzker, Institut fuer Schicht- und Ion (Germany)


Published in SPIE Proceedings Vol. 1275:
Hard Materials in Optics
Carl-Gustaf Ribbing, Editor(s)

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