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Proceedings Paper

Mesoscale 3D manufacturing: varying focusing conditions for efficient direct laser writing of polymers
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Paper Abstract

In this paper, we report a novel approach for efficient fabrication of mesoscale polymer 3D microstructures. It is implemented by direct laser writing varying exposure beam focusing conditions. By carefully optimizing the fabrication parameters (laser intensity, scanning velocity/exposure time, changing objective lens) complex 3D geometries of the microstructures can be obtained rapidly. Additionally, we demonstrate this without the use of the photoinitiator as photosensitizer doped in the pre-polymer material (SZ2080). At femtosecond pulsed irradiation ~TW/cm² intensities the localized free radical polymerization is achieved via avalanche induced bond braking. Such microstructures have unique biocompatibility and optical transparency as well as optical damage threshold value. By creating the bulk part of the structure using low-NA (0.45) objective and subsequently fabricating the fine features using oil immersion high-NA (1.4) objective the manufacturing time is reduced dramatically (30x is demonstrated). Using this two objective method a prototype of functional microdevice was produced: 80 and 85 µm diameter microfluidic tubes with the fine filter consisting of 4 µm period grating structure that has 400 nm wide threads, which corresponds to a feature precision aspect ratio of ~200. Therefore, such method has great potential as a polymer fabrication tool for mesoscale optical, photonic and biomedical applications as well as highly integrated 3D µ-systems. Furthermore, the proposed approach is not limited to lithography and can be implemented in a more general type of laser writing, such as inscription within transparent materials or substractive manufacturing by ablation.

Paper Details

Date Published: 2 May 2014
PDF: 12 pages
Proc. SPIE 9126, Nanophotonics V, 912620 (2 May 2014); doi: 10.1117/12.2051346
Show Author Affiliations
Linas Jonušauskas, Vilnius Univ. (Lithuania)
Mangirdas Malinauskas, Vilnius Univ. (Lithuania)

Published in SPIE Proceedings Vol. 9126:
Nanophotonics V
David L. Andrews; Jean-Michel Nunzi; Andreas Ostendorf, Editor(s)

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