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Proceedings Paper

Arrays of millimeter-sized glass lenses for miniature inspection systems
Author(s): J. Albero; S. Perrin; S. Bargiel; M. Baranski; N. Passilly; L. Gauthier-Manuel; C. Gorecki
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Paper Abstract

In this paper, we adapt a technique employed for glass microlenses fabrication in order to obtain matrices of millimeter size lenses for inspection applications. The use of microfabrication processes and Micro-Electro-Mechanical Systems (MEMS) compatible materials allow the integration of lenses larger than usual in microsystems. Since the presented lenses can have 2 mm in diameter or more, some aspects apparently irrelevant when diameters are lower than 500 μm must be reviewed and taken into account. Indeed, when the lenses are in the millimeter range, problems such as size nonuniformities within a matrix and asymmetric shapes of each lens are dependent on parameters as mask design, depth of the silicon cavities and enclosed vacuum control after anodic bonding, glass reflow temperature and even the position of the lenses on the substrate. Issues related to the fabrication flow-chart are addressed in this paper and solutions are proposed. First results are shown to prove the pertinence of this technique to fabricate MEMS-compatible millimetersized lenses to be integrated in miniature inspection systems. We also discuss some of the paths to follow that could help improving the performances.

Paper Details

Date Published: 2 May 2014
PDF: 7 pages
Proc. SPIE 9130, Micro-Optics 2014, 91300U (2 May 2014); doi: 10.1117/12.2051043
Show Author Affiliations
J. Albero, MN2S, CNRS, FEMTO-ST (France)
S. Perrin, MN2S, CNRS, FEMTO-ST (France)
S. Bargiel, MN2S, CNRS, FEMTO-ST (France)
M. Baranski, MN2S, CNRS, FEMTO-ST (France)
N. Passilly, MN2S, CNRS, FEMTO-ST (France)
L. Gauthier-Manuel, FEMTO-ST, CNRS (France)
C. Gorecki, MN2S, CNRS, FEMTO-ST (France)

Published in SPIE Proceedings Vol. 9130:
Micro-Optics 2014
Hugo Thienpont; Jürgen Mohr; Hans Zappe; Hirochika Nakajima, Editor(s)

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