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Proceedings Paper

High-resolution TFT-LCD for spatial light modulator
Author(s): JaeWon Lee; Yong-Hae Kim; Chun-Won Byun; Jae-Eun Pi; Himchan Oh; GiHeon Kim; Myung-Lae Lee; Hye-Yong Chu; Chi-Sun Hwang
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Paper Abstract

SLM with very fine pixel pitch is needed for the holographic display system. Among various kinds of SLMs, commercially available high resolution LCoS has been widely used as a spatial light modulator. But the size of commercially available LCoS SLM is limited because the manufacturing technology of LCoS is based on the semiconductor process developed on small size Si wafer. Recently very high resolution flat panel display panel (~500ppi) was developed as a “retina display”. Until now, the pixel pitch of flat panel display is several times larger than the pixel pitch of LCoS. But considering the possibility of shrink down the pixel pitch with advanced lithographic tools, the application of flat panel display will make it possible to build a SLM with high spatial bandwidth product. We simulated High resolution TFT-LCD panel on glass substrate using oxide semiconductor TFT with pixel pitch of 20um. And we considered phase modulation behavior of LC(ECB) mode. The TFT-LCD panel is reflective type with 4-metal structure with organic planarization layers. The technical challenge for high resolution large area SLM will be discussed with very fine pixel.

Paper Details

Date Published: 5 June 2014
PDF: 6 pages
Proc. SPIE 9117, Three-Dimensional Imaging, Visualization, and Display 2014, 911719 (5 June 2014); doi: 10.1117/12.2050878
Show Author Affiliations
JaeWon Lee, Electronics and Telecommunications Research Institute (Korea, Republic of)
Yong-Hae Kim, Electronics and Telecommunications Research Institute (Korea, Republic of)
Chun-Won Byun, Electronics and Telecommunications Research Institute (Korea, Republic of)
Jae-Eun Pi, Electronics and Telecommunications Research Institute (Korea, Republic of)
Himchan Oh, Electronics and Telecommunications Research Institute (Korea, Republic of)
GiHeon Kim, Electronics and Telecommunications Research Institute (Korea, Republic of)
Myung-Lae Lee, Electronics and Telecommunications Research Institute (Korea, Republic of)
Hye-Yong Chu, Electronics and Telecommunications Research Institute (Korea, Republic of)
Chi-Sun Hwang, Electronics and Telecommunications Research Institute (Korea, Republic of)


Published in SPIE Proceedings Vol. 9117:
Three-Dimensional Imaging, Visualization, and Display 2014
Bahram Javidi; Jung-Young Son; Osamu Matoba; Manuel Martínez-Corral; Adrian Stern, Editor(s)

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