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Proceedings Paper

Microplasma fabrication: from semiconductor technology for 2D-chips and microfluidic channels to rapid prototyping and 3D-printing of microplasma devices
Author(s): R. Shatford; Vassili Karanassios
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Paper Abstract

Microplasmas are receiving attention in recent conferences and current scientific literature. In our laboratory, microplasmas-on-chips proved to be particularly attractive. The 2D- and 3D-chips we developed became hybrid because they were fitted with a quartz plate (quartz was used due to its transparency to UV). Fabrication of 2D- and 3D-chips for microplasma research is described. The fabrication methods described ranged from semiconductor fabrication technology, to Computer Numerical Control (CNC) machining, to 3D-printing. These methods may prove to be useful for those contemplating in entering microplasma research but have no access to expensive semiconductor fabrication equipment.

Paper Details

Date Published: 22 May 2014
PDF: 8 pages
Proc. SPIE 9106, Advanced Environmental, Chemical, and Biological Sensing Technologies XI, 91060H (22 May 2014); doi: 10.1117/12.2050538
Show Author Affiliations
R. Shatford, Univ. of Waterloo (Canada)
Vassili Karanassios, Univ. of Waterloo (Canada)

Published in SPIE Proceedings Vol. 9106:
Advanced Environmental, Chemical, and Biological Sensing Technologies XI
Tuan Vo-Dinh; Robert A. Lieberman; Günter G. Gauglitz, Editor(s)

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