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Proceedings Paper

Linear bolometer array using a high TCR VOx-Au film
Author(s): Evan M. Smith; James C. Ginn; Andrew P. Warren; Christopher J. Long; Deep Panjwani; Robert E. Peale; David J. Shelton
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Paper Abstract

We present a design for a low-noise bolometer linear array based on the temperature-dependent conductivity of a VOx- Au film. Typical thin film bolometers must compromise between low resistivity to limit Johnson noise and high temperature coefficient of resistivity (TCR) to maximize responsivity. Our vanadium oxide is alloyed with a small concentration of gold by co-sputtering, which gives very low resistivity and very high TCR simultaneously. The film is fabricated on an air bridge device having high thermal conductivity and small thermal time constant optimized for 30 to 60 Hz frame rates. The linear array functions as a low-power profile sensor with a modulated bias. For 1 V bias, we predict responsivity exceeding 1200 V/W. Johnson noise dominates with predicted NEP values as low as 1.0 × 10-11 W/Hz1/2. Preliminary device testing shows film resistivity below 2.5 Ω-cm with TCR exceeding -2.0%. Preliminary measurements of NEP and D* are reported.

Paper Details

Date Published: 24 June 2014
PDF: 8 pages
Proc. SPIE 9070, Infrared Technology and Applications XL, 90701Z (24 June 2014); doi: 10.1117/12.2050434
Show Author Affiliations
Evan M. Smith, Plasmonics, Inc. (United States)
Univ. of Central Florida (United States)
James C. Ginn, Plasmonics, Inc. (United States)
Andrew P. Warren, Plasmonics, Inc. (United States)
Christopher J. Long, Plasmonics, Inc. (United States)
Deep Panjwani, Univ. of Central Florida (United States)
Robert E. Peale, Univ. of Central Florida (United States)
David J. Shelton, Plasmonics, Inc. (United States)


Published in SPIE Proceedings Vol. 9070:
Infrared Technology and Applications XL
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton, Editor(s)

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