Share Email Print
cover

Proceedings Paper

Latest improvements in microbolometer thin film packaging: paving the way for low-cost consumer applications
Author(s): J. J. Yon; G. Dumont; V. Goudon; S. Becker; A. Arnaud; S. Cortial; C. L. Tisse
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Silicon-based vacuum packaging is a key enabling technology for achieving affordable uncooled Infrared Focal Plane Arrays (IRFPA) required by a promising mass market that shows momentum for some extensive consumer applications, such as automotive driving assistance, smart presence localization and building management. Among the various approaches studied worldwide, CEA, LETI in partnership with ULIS is committed to the development of a unique technology referred to as PLP (Pixel Level Packaging). In this PLP technology, each bolometer pixel is sealed under vacuum using a transparent thin film deposition on wafer. PLP operates as an array of hermetic micro caps above the focal plane, each enclosing a single microbolometer. In continuation of our on-going studies on PLP for regular QVGA IRFPAs, this paper emphasizes on the innate scalability of the technology which was successfully demonstrated through the development of an 80 × 80 pixel IRFPA. The relevance of the technology with regard to the two formats is discussed, considering both performance and cost issues. We show that the suboptimal fill factor inherent to the PLP arrangement is not so critical when considering smaller arrays preferably fitted for consumer applications. The discussion is supported with the electro-optical performance measurements of the PLP-based 80×80 demonstrator.

Paper Details

Date Published: 24 June 2014
PDF: 8 pages
Proc. SPIE 9070, Infrared Technology and Applications XL, 90701N (24 June 2014); doi: 10.1117/12.2050378
Show Author Affiliations
J. J. Yon, CEA-LETI-Minatec (France)
G. Dumont, CEA-LETI-Minatec (France)
V. Goudon, CEA-LETI-Minatec (France)
S. Becker, CEA-LETI-Minatec (France)
A. Arnaud, CEA-LETI-Minatec (France)
S. Cortial, ULIS (France)
C. L. Tisse, ULIS (France)


Published in SPIE Proceedings Vol. 9070:
Infrared Technology and Applications XL
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton, Editor(s)

© SPIE. Terms of Use
Back to Top