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Proceedings Paper

Metal oxide gas sensors on the nanoscale
Author(s): A. Plecenik; A. A. Haidry; T. Plecenik; P. Durina; M. Truchly; M. Mosko; B. Grancic; M. Gregor; T. Roch; L. Satrapinskyy; A. Moskova; M. Mikula; P. Kus
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Paper Abstract

Low cost, low power and highly sensitive gas sensors operating at room temperature are very important devices for controlled hydrogen gas production and storage. One of the disadvantages of chemosensors is their high operating temperature (usually 200 – 400 °C), which excludes such type of sensors from usage in explosive environment. In this report, a new concept of gas chemosensors operating at room temperature based on TiO2 thin films is discussed. Integration of such sensor is fully compatible with sub-100 nm semiconductor technology and could be transferred directly from labor to commercial sphere.

Paper Details

Date Published: 4 June 2014
PDF: 9 pages
Proc. SPIE 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI, 90830Y (4 June 2014); doi: 10.1117/12.2050349
Show Author Affiliations
A. Plecenik, Comenius Univ. in Bratislava (Slovakia)
A. A. Haidry, Comenius Univ. in Bratislava (Slovakia)
T. Plecenik, Comenius Univ. in Bratislava (Slovakia)
P. Durina, Comenius Univ. in Bratislava (Slovakia)
M. Truchly, Comenius Univ. in Bratislava (Slovakia)
M. Mosko, Comenius Univ. in Bratislava (Slovakia)
Institute of Electrical Engineering, SAS (Slovakia)
B. Grancic, Comenius Univ. in Bratislava (Slovakia)
M. Gregor, Comenius Univ. in Bratislava (Slovakia)
T. Roch, Comenius Univ. in Bratislava (Slovakia)
L. Satrapinskyy, Comenius Univ. in Bratislava (Slovakia)
A. Moskova, Institute of Electrical Engineering, SAS (Slovakia)
M. Mikula, Comenius Univ. in Bratislava (Slovakia)
P. Kus, Comenius Univ. in Bratislava (Slovakia)


Published in SPIE Proceedings Vol. 9083:
Micro- and Nanotechnology Sensors, Systems, and Applications VI
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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