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Proceedings Paper

Laser processing of YBCO superconducting thin films
Author(s): Rumen I. Tomov; Valery S. Serbezov; Peter A. Atanasov
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Paper Abstract

Superconducting Y1Ba2Cu3O7 thin films were prepared by in-situ oxygen plasma-assisted XeCl excimer laser deposition. A multistep superfast CO2 laser annealing was investigated as a method of modification of the Y1Ba2Cu3O7 thin films on Si. It was revealed that cw CO2 laser heating of substrate surface may be also a method for reduction of particulate density. The buffer layers such as Ba(Sr)TiO3 and YSZ(111) were successfully experimented for preparation of good superconducting thin films. It is shown that N2 laser ablation may be a proper technique for patterning Y1Ba2Cu3O7 thin films. The films were characterized by EDAX, SEM, XRD and Raman spectroscopy.

Paper Details

Date Published: 31 March 1995
PDF: 6 pages
Proc. SPIE 2502, Gas Flow and Chemical Lasers: Tenth International Symposium, (31 March 1995); doi: 10.1117/12.204986
Show Author Affiliations
Rumen I. Tomov, Institute of Electronics (Bulgaria)
Valery S. Serbezov, Institute of Electronics (Bulgaria)
Peter A. Atanasov, Institute of Electronics (Bulgaria)


Published in SPIE Proceedings Vol. 2502:
Gas Flow and Chemical Lasers: Tenth International Symposium
Willy L. Bohn; Helmut Huegel, Editor(s)

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