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Proceedings Paper

Microsensors by integration of nanostructured oxides in micromachined platforms
Author(s): Emanuele Barborini; Matteo Leccardi; Leandro Lorenzelli; Paolo Milani
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Proc. SPIE 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI, ; doi: 10.1117/12.2049828
Show Author Affiliations
Emanuele Barborini, Tethis S.p.A. (Italy)
Matteo Leccardi, Tethis S.p.A. (Italy)
Leandro Lorenzelli, Fondazione Bruno Kessler (Italy)
Paolo Milani, Univ. degli Studi di Milano (Italy)


Published in SPIE Proceedings Vol. 9083:
Micro- and Nanotechnology Sensors, Systems, and Applications VI
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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