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Proceedings Paper

Quality measurements of KrF laser beams under high-repetition rate operation with advanced high-speed photography: preparatory experiments
Author(s): Koichi Kasuya; Takamasa Suzuki; S. Matsuno; Masato Watanabe; Yasumasa Kawakita; T. Kuwahara; Hidekazu Shioda; Hirotaka Kanazawa; H. Okuda
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Paper Abstract

Although much efforts have been made to develop higher performance excimer lasers mainly in Europe and Japan supported by the community and the government, an interdisciplinary subject in the paper title has not ever been investigated in detail. To take care of this un- attacked research region lying between various research groups, we tried to measure the beam quality of a discharge-pumped KrF laser under a rather high repetition rate operation. As we are interested in the diagnostics of various high speed phenomena, we measured the beam quality with advanced high speed photography. The spatial and temporal beam patterns were observed under various experimental conditions, and they were analyzed to start our high repetition-rate experiments. The results showed that an unstable resonator could produce high quality laser beams with the lower beam divergence angle.

Paper Details

Date Published: 31 March 1995
PDF: 8 pages
Proc. SPIE 2502, Gas Flow and Chemical Lasers: Tenth International Symposium, (31 March 1995); doi: 10.1117/12.204953
Show Author Affiliations
Koichi Kasuya, Tokyo Institute of Technology (Japan)
Takamasa Suzuki, Tokyo Institute of Technology (Japan)
S. Matsuno, Tokyo Institute of Technology (Japan)
Masato Watanabe, Tokyo Institute of Technology (Japan)
Yasumasa Kawakita, Tokyo Institute of Technology (Japan)
T. Kuwahara, Tokyo Institute of Technology (Japan)
Hidekazu Shioda, Tokyo Institute of Technology (Japan)
Hirotaka Kanazawa, Tokyo Institute of Technology (Japan)
H. Okuda, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 2502:
Gas Flow and Chemical Lasers: Tenth International Symposium
Willy L. Bohn; Helmut Huegel, Editor(s)

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