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Proceedings Paper

A fabrication and characterictics of microbolometer detectors using VOx/ZnO/VOx multilayer thin film processing
Author(s): Myung-Soo Han; Dae Hyeon Kim; Hang Ju Ko; Jae Chul Shin; Hyo Jin Kim; Do Gun Kim
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Paper Abstract

In this work, a novel fabrication method for VOx-ZnO multilayers with mixed phase of the VO2 and V2O3 through the diffusion of oxygen by annealing at low temperature is presented. A stable sandwich structure of a VOx/ZnO/VOx multilayer was deposited at room temperature, through the oxygen gas flow rate, by RF sputtering system, and the mixed phase was formed through oxygen diffusion by annealing at O2 atmosphere. The results show that the single phase like multilayer formed by this process has a high TCR of more than -2.5%/K and low resistance of about 100 kohm at room temperature. XRD results for the as-deposited VOx/ZnO/VOx multilayer.

Paper Details

Date Published: 24 June 2014
PDF: 7 pages
Proc. SPIE 9070, Infrared Technology and Applications XL, 90701X (24 June 2014); doi: 10.1117/12.2049513
Show Author Affiliations
Myung-Soo Han, Korea Photonics Technology Institute (Korea, Republic of)
Dae Hyeon Kim, Korea Photonics Technology Institute (Korea, Republic of)
Hang Ju Ko, Korea Photonics Technology Institute (Korea, Republic of)
Jae Chul Shin, Korea Photonics Technology Institute (Korea, Republic of)
Hyo Jin Kim, Korea Photonics Technology Institute (Korea, Republic of)
Do Gun Kim, Korea Photonics Technology Institute (Korea, Republic of)


Published in SPIE Proceedings Vol. 9070:
Infrared Technology and Applications XL
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton, Editor(s)

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