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Proceedings Paper

Observation of IC operation using nematic liquid crystals and the laser scanning microscope
Author(s): Joachim Fritz; Rainer Lackmann
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Paper Abstract

A nondestructive analysis method for observing the dynamic operation of integrated circuits is described. The operating principle in reflective mode bases on voltage tunable birefringence in homeotropically aligned nematic liquid crystals with negative dielectric anisotropy. The basic principles of the static and dynamic deformation are discussed and theoretical and experimental results treating the voltage and frequency response are presented. A typical application example of a CMOS IC analysis shows the employment of nematic liquid crystals for failure analysis.

Paper Details

Date Published: 1 August 1990
PDF: 12 pages
Proc. SPIE 1274, Electro-Optic and Magneto-Optic Materials II, (1 August 1990); doi: 10.1117/12.20491
Show Author Affiliations
Joachim Fritz, Fraunhofer Institute of Microe (Germany)
Rainer Lackmann, Fraunhofer Institute of Microe (Germany)

Published in SPIE Proceedings Vol. 1274:
Electro-Optic and Magneto-Optic Materials II
Hans Dammann, Editor(s)

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