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Proceedings Paper

Development and characterization of a new silicone/platine based 2-DoF sensorized end-effector for micromanipulators
Author(s): Xin Xu; Joël Agnus; Micky Rakotondrabe
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Paper Abstract

This paper reports the development and the characterization of a new silicone end-effector with integrated sensor based on a set of platine piezoresistive gage. Used as interface between a micromanipulator or actuator and a manipulated small object, the features of the end-effector are: 1) its compactness (length between 750μm and 2mm, width=40μm, thickness=25μm), 2) the fully integrated force measurement system thanks to microfabricated platine piezoresistive gage, 3) the 2-dof (degrees of freedom: along y and z axis) measurement capability, 4) the high sensitivity of measurment provided for each axis (0.6% to 0.8% for the range of measured force of 1mN), 4) and the relatively high gauge factor (G=6). This paper reports the principle, the development, the microfabrication and the characterization of the 2-dof sensorized end-effector.

Paper Details

Date Published: 4 June 2014
PDF: 6 pages
Proc. SPIE 9116, Next-Generation Robots and Systems, 911608 (4 June 2014); doi: 10.1117/12.2049041
Show Author Affiliations
Xin Xu, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)
Joël Agnus, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)
Micky Rakotondrabe, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)


Published in SPIE Proceedings Vol. 9116:
Next-Generation Robots and Systems
Dan O. Popa; Muthu B. J. Wijesundara, Editor(s)

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