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Proceedings Paper

Enhanced characterization of BCP-based DSA processes using innovative CD SEM analysis
Author(s): Todd R. Younkin; Robert Bristol; Michael J. Leeson; Eungnak Han; Florian Gstrein; David Shykind; Takeshi Kato; Kazuhiro Ueda; Akiyuki Sugiyama; Hiroshi Yoshida; Alex Danilevsky; Andy Self
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Paper Details

Date Published:
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Proc. SPIE 9051, Advances in Patterning Materials and Processes XXXI, 905113; doi: 10.1117/12.2048280
Show Author Affiliations
Todd R. Younkin, Intel Corp. (United States)
Robert Bristol, Intel Corp. (United States)
Michael J. Leeson, Intel Corp. (United States)
Eungnak Han, Intel Corp. (United States)
Florian Gstrein, Intel Corp. (United States)
David Shykind, Intel Corp. (United States)
Takeshi Kato, Hitachi High-Tech Trading Corp. (Japan)
Kazuhiro Ueda, Hitachi High-Technologies Corp. (Japan)
Akiyuki Sugiyama, Hitachi High-Technologies Corp. (Japan)
Hiroshi Yoshida, Hitachi, Ltd. (Japan)
Alex Danilevsky, Hitachi High Technologies America, Inc. (United States)
Andy Self, Hitachi High Technologies America, Inc. (United States)


Published in SPIE Proceedings Vol. 9051:
Advances in Patterning Materials and Processes XXXI
Thomas I. Wallow; Christoph K. Hohle, Editor(s)

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