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Proceedings Paper

Continuous large-area nanopatterning
Author(s): Ian McMackin
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Paper Details

Date Published:
Proc. SPIE 9049, Alternative Lithographic Technologies VI, ; doi: 10.1117/12.2046578
Show Author Affiliations
Ian McMackin, Rolith, Inc. (United States)

Published in SPIE Proceedings Vol. 9049:
Alternative Lithographic Technologies VI
Douglas J. Resnick; Christopher Bencher, Editor(s)

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