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Proceedings Paper

Self-aligned quadruple patterning-aware routing
Author(s): Fumiharu Nakajima; Chikaaki Kodama; Hirotaka Ichikawa; Koichi Nakayama; Shigeki Nojima; Toshiya Kotani
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Paper Abstract

Self-Aligned Quadruple Patterning (SAQP) is one of the most leading techniques in 14 nm node and beyond. However, the construction of feasible layout configurations must follow stricter constraints than in LELELE triple patterning process. Some SAQP layout decomposition methods were recently proposed. However, due to strict constraints required for feasible SAQP layout, the decomposition strategy considering an arbitrary layout does not seem realistic. In this paper, we propose a new routing method for feasible SAQP layout requiring no decomposition. Our method performs detailed routing by correct-by-construction approach and offers compliant layout configuration without any pitch conflict.

Paper Details

Date Published: 28 March 2014
PDF: 7 pages
Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 90530C (28 March 2014); doi: 10.1117/12.2046241
Show Author Affiliations
Fumiharu Nakajima, Toshiba Corp. (Japan)
Chikaaki Kodama, Toshiba Corp. (Japan)
Hirotaka Ichikawa, Toshiba Microelectronics Corp. (Japan)
Koichi Nakayama, Toshiba Corp. (Japan)
Shigeki Nojima, Toshiba Corp. (Japan)
Toshiya Kotani, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 9053:
Design-Process-Technology Co-optimization for Manufacturability VIII
John L. Sturtevant; Luigi Capodieci, Editor(s)

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